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 Wysłany: Śro 17:56, 08 Gru 2010 Temat postu: tory burch Match the width of the top curve of lin |
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Match the width of the top curve of linewidth measurement
Department of width and bottom width, and side wall has been significantly improved. Sample processing is the direction through the lattice by selective etching agent, the side wall,[link widoczny dla zalogowanych], in theory, should be close to 90. . Edge stitching around the corner after the image is 87.8, respectively. And 87.9. , Close to the theoretical value. After stitching width fitting than the original image obtained from fitting the width decreases significantly, especially in the central line width and bottom width. Because the side wall measuring 13 ・ (d) (a) measurement of the first image (b) the second measurement the rotated image (c) after the reticle stitching images (d) the top position of the center line registration 'map 4, scanning probe measurement of the amount used to improve the accuracy of,[link widoczny dla zalogowanych], after stitching the width of the image to get closer to the real value of the sample should be. It can be seen from the measurements, the measurement results of the probe is more significant. Table 1 Comparison of measured before and after image stitching the first measurement the second measurement mosaic images (rotation before the sample) (sample rotation) standard deviation standard deviation standard deviation mean difference d Mean difference Mean difference d dbT/nm601.83.6603.34 .2605.76.6bM/nm707.14.2704.56.1617.67.76 latch / nm803.28.9805.87.5630.57.9AL / (.) 65.61.466.30.487.80 .2 AR / (.) 87.90.287.90.287.90.2h/nm342.81.4339.81.3341.51.65 Conclusion AFM measurements for nano-scale samples can only get one side groove of the side walls compared the characteristics of real images, presented a two-image mosaic method. Image measured after the sample around the axis 180. And then measure again to get a more realistic one side of the wall image, select the respective image data in accordance with the good side of the wall of groove width at the top of the curve matching using image registration techniques spliced into a more realistic sample images. Corrosion mathematical algorithm for reconstruction graphics image, and calculate the sample fitting groove width, height, corner and edge features such as size. Among them, the middle groove width,[link widoczny dla zalogowanych], bottom width and side wall of the side walls, engraved with the ideal line (a vertical wall of the groove) of the parameters closer. Two-image mosaic method proposed expansion of the role of the probe solution to provide a new way of thinking. References [1] LisaGottesfeldBrown. AsurveyofiiT ~ geregistrationtechniques. ACMComputingsurveys [J], 1992,24 (4) :325-376. [2] Zhao Xue-Zeng, Chu Wei,[link widoczny dla zalogowanych], TheodoreVorburger and so on. AFM-based nano-scale linewidth measurement model and its algorithm. Mechanical Engineering [J], 2004,[link widoczny dla zalogowanych],40 (4) :50-57 [3] Vdlam ~ aj. S. . Morph31ogicalestimation0ftipgea'netryforscannedprobemicmsc ~ y. SurfaceSci ~ - e [J]. 1994,321:287-300 [4] VillarrubiaJ. S. . AlgnthmsforScannedPmheMicroscopeImageSimulation, SurfaceReconstructionandTipEstimation. JournalofResearchoftheNationalInstituteofStandardsandTechnology [J]. 1997,120:425-454 [5] P. BeslandN. Mckay. AMethodforRegistrationof3 a DShapes. IEEETRANSonPAMI [J], 1992,14 (2) :239-256 [6] MichelA. Audette, [7] FrankP. Ferrie. Analgorithmicoverviewofsurfaceregistrationtechniquesformedicalimaging. Medicallm-ageAnaly ~ s [J]. 4 (2000) :201-217 PCT contented power
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